About: Sputtering

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Emission of surface atoms through energetic particle bombardment

Property	Value
dbo:description	proces (cs) емісія атомів із поверхні твердого тіла під час його бомбардування важкими частинками (uk) разрушение поверхности твёрдых тел посредством ионной бомбардировки (ru) תופעה בה חלקיקים מיקרוסקופיים של חומר מוצק נפלטים מעל פני השטח שלו (iw) emission of surface atoms through energetic particle bombardment (en) physikalisches Verfahren zum Abtragen von Oberflächen durch Beschuss mit Ionen (de)
dbo:thumbnail	wiki-commons:Special:FilePath/Sputtering_system.jpg?width=300
dbo:wikiPageExternalLink	http://www.ajaint.com/whatis.htm http://www.heraeus-targets.com/en/technology/_sputteringbasics/sputtering.aspx http://www.vem-co.com/thin-film-evaporation-guide https://www.youtube.com/watch%3Fv=vLGxAC2DxSs https://ghostarchive.org/varchive/youtube/20211211/vLGxAC2DxSs%7C http://www.avs.org/education.catalog.aspx http://sites.google.com/site/KalypsoSimulation
dbo:wikiPageWikiLink	dbr:Plasma_cleaning dbc:Coatings dbc:Materials_science dbr:Europa_(moon) dbr:Outer_space dbr:Thermodynamic_equilibrium dbr:Vacuum_deposition dbr:Optical_coating dbr:Gas dbr:Nanotechnology dbr:Plasma_(physics) dbr:Semiconductor_device dbr:Vacuum dbr:Alternating_current dbr:Electronvolt dbr:Ion_plating dbr:Physical_vapor_deposition dbr:Argon dbr:Mars dbr:Mercury_(planet) dbr:Moon dbr:Inequality_(mathematics) dbr:Atmosphere dbc:Surface_science dbr:Secondary_ion_mass_spectrometry dbr:Alpha_radiation dbc:Thin_film_deposition dbr:Momentum dbr:Solar_wind dbr:Particle_accelerator dbr:Binding_energy dbr:Etching dbr:Vapor_pressure dbr:Crystal_lattice dbr:Surface_science dbr:Direct_current dbr:Anisotropy dbr:Ion_source dbr:Stopping_power_(particle_radiation) dbr:Resputtering dbr:Sputter_deposition dbr:Reactive-ion_etching dbr:Stopping_and_Range_of_Ions_in_Matter dbr:Exosphere dbr:Mass_spectrometry dbr:Thin_film dbr:Ion_milling_machine dbr:Wear dbr:Particle dbr:Radio_frequency dbr:Collision_cascade dbr:Insulator_(electrical) dbr:Electron-volts dbr:Hollow_atoms dbr:Thin_film_deposition dbr:Wafer_(semiconductor) dbr:File:Linearcollisioncascadesput.png dbr:File:Sputterer.JPG dbr:File:Sputtering_system.jpg
dbp:date	2006-04-11 (xsd:date) 2010-05-20 (xsd:date) 2013-02-15 (xsd:date)
dbp:url	https://web.archive.org/web/20060411160842/http:/www.avs.org/education.catalog.aspx https://web.archive.org/web/20100520004120/http:/sites.google.com/site/KalypsoSimulation https://web.archive.org/web/20130215095946/http:/www.ajaint.com/whatis.htm
dbp:wikiPageUsesTemplate	dbt:Commons_category dbt:Authority_control dbt:Main dbt:Reflist dbt:Cite_journal dbt:Cite_AV_media dbt:Cbignore dbt:Webarchive dbt:Short_description
dct:subject	dbc:Coatings dbc:Materials_science dbc:Surface_science dbc:Physical_vapor_deposition_techniques dbc:Thin_film_deposition
gold:hypernym	dbr:Process
rdfs:label	Sputtering (en) رش مهبطي (ar) Polvorització catòdica (ca) Naprašování (cs) Sputtern (de) Pulverización catódica (es) Spriúchadh (ga) Polverizzazione catodica (it) Pulvérisation cathodique (fr) スパッタリング (ja) Sputteren (nl) 스퍼터링 (ko) Pulverização catódica (pt) Ионное распыление (ru) Іонне розпилення (uk) 溅射 (zh)
owl:sameAs	freebase:Sputtering http://d-nb.info/gnd/4182614-0 wikidata:Sputtering dbpedia-it:Sputtering dbpedia-nl:Sputtering dbpedia-de:Sputtering dbpedia-fr:Sputtering dbpedia-tr:Sputtering dbpedia-zh:Sputtering dbpedia-ja:Sputtering dbpedia-pt:Sputtering dbpedia-he:Sputtering dbpedia-es:Sputtering dbpedia-fa:Sputtering dbpedia-ru:Sputtering dbpedia-ko:Sputtering dbpedia-ca:Sputtering dbpedia-af:Sputtering dbpedia-ar:Sputtering dbpedia-bg:Sputtering dbpedia-cs:Sputtering dbpedia-ga:Sputtering dbpedia-hi:Sputtering dbpedia-hy:Sputtering dbpedia-uk:Sputtering dbpedia-global:Sputtering
prov:wasDerivedFrom	wikipedia-en:Sputtering?oldid=1267539454&ns=0
foaf:depiction	wiki-commons:Special:FilePath/Busek's_BET-3_Ion_Thruster.jpg wiki-commons:Special:FilePath/Linearcollisioncascadesput.png wiki-commons:Special:FilePath/Sputterer.jpg wiki-commons:Special:FilePath/Sputtering_system.jpg
foaf:isPrimaryTopicOf	wikipedia-en:Sputtering
is dbo:wikiPageRedirects of	dbr:Sputter_cleaning dbr:Sputter
is dbo:wikiPageWikiLink of	dbr:Kepler-47c dbr:Blu-ray_Disc_recordable dbr:Space_weathering dbr:Titanium_aluminium_nitride dbr:High_voltage dbr:Plansee_SE dbr:Plasma-facing_material dbr:Platinum_silicide dbr:High-entropy_alloy dbr:Characterization_of_nanoparticles dbr:FilmTack dbr:Optical_disc dbr:Ion_implantation dbr:Electron-beam_physical_vapor_deposition dbr:Atmospheric_escape dbr:Cleaning dbr:Beam_splitter dbr:HD_69830_d dbr:Ariel_(moon) dbr:Ganymede_(moon) dbr:Io_(moon) dbr:Magnetosphere_of_Jupiter dbr:Resistor dbr:Titania_(moon) dbr:486958_Arrokoth dbr:Ion_beam dbr:Glow_discharge dbr:Vacuum_deposition dbr:Plasma_etching dbr:Plasma_(physics) dbr:Copper_indium_gallium_selenide_solar_cell dbr:Mirror dbr:Bio-MEMS dbr:Gallium(III)_telluride dbr:Cathode-ray_tube dbr:Atmosphere_of_the_Moon dbr:Electroplating dbr:Alternative_approaches_to_redefining_the_kilogram dbr:Piezoelectric_sensor dbr:Gliese_876_b dbr:Thin-film_transistor dbr:Corrosion_in_space dbr:Stencil_lithography dbr:Superlattice dbr:Escapade dbr:Low-energy_ion_scattering dbr:Atomic_absorption_spectroscopy dbr:Electrochromism dbr:Hollow-cathode_lamp dbr:Pulsed_laser_deposition dbr:Sputter_cleaning dbr:Energetic_neutral_atom dbr:Astatine dbr:Gold dbr:Mercury_(planet) dbr:Moon dbr:Nuclear_fuel_cycle dbr:Ruthenium dbr:Samarium_monochalcogenides dbr:Tantalum dbr:Titanium dbr:Castle_Bravo dbr:Group_5_element dbr:Transparent_conducting_film dbr:Exploration_of_Io dbr:Habitability_of_natural_satellites dbr:Neon_lamp dbr:Gas_core_reactor_rocket dbr:Index_of_physics_articles_(S) dbr:Josef_Michl dbr:Auger_architectomics dbr:Secondary_ion_mass_spectrometry dbr:William_Robert_Grove dbr:Evaporation_(deposition) dbr:Cadmium_sulfide dbr:Hot-filament_ionization_gauge dbr:Radiant_barrier dbr:Thin-film_lithium-ion_battery dbr:Focused_ion_beam dbr:Thin-film_solar_cell dbr:Indium_tin_oxide dbr:Tantalum_nitride dbr:Pressure_measurement dbr:Zinc_oxide dbr:Bismuth_germanate dbr:Electrodeless_plasma_excitation dbr:Oxygen-free_copper dbr:Lunar_soil dbr:Fusion_power dbr:Kepler-16b dbr:Corium_(nuclear_reactor) dbr:Plasma-enhanced_chemical_vapor_deposition dbr:Secondary_emission dbr:Sensitive_high-resolution_ion_microprobe dbr:Silver_nanoparticle dbr:Stopping_power_(particle_radiation) dbr:Metal–semiconductor_junction dbr:Ion-beam_sculpting dbr:Reactive_multi-layer_foil dbr:Ultra-high_vacuum dbr:Thin-film_interference dbr:Battelle_Memorial_Institute dbr:Sputter_deposition dbr:Head_crash dbr:Ion_track dbr:Sample_preparation_in_mass_spectrometry dbr:Vera_Yurasova dbr:Stopping_and_Range_of_Ions_in_Matter dbr:Oxide_thin-film_transistor dbr:Fluorescent_lamp dbr:Gas-filled_tube dbr:Thin_film dbr:Mass_spectrometry_imaging dbr:Severe_plastic_deformation dbr:Carbon_nanotube_metal_matrix_composite dbr:Waffle-iron_filter dbr:Ion_milling_machine dbr:United_Kingdom_patent_394325 dbr:List_of_resistors dbr:Auger_electron_spectroscopy dbr:Nixie_tube dbr:Future_of_Earth dbr:Thermocompression_bonding dbr:Metallizing dbr:Capacitively_coupled_plasma dbr:Collision_cascade dbr:Binary_collision_approximation dbr:List_of_plasma_physics_articles dbr:Lunarcrete dbr:Miasolé dbr:Divertor dbr:Bismuth_ferrite dbr:Paul_André_Albert dbr:Ion_pump_(physics) dbr:Sodium_tail_of_the_Moon dbr:American_Elements dbr:Mark_H._Shapiro dbr:Layer_(electronics) dbr:HIP_57274_d dbr:Monazite_geochronology dbr:Hollow_cathode_effect dbr:Ion_implantation-induced_nanoparticle_formation dbr:Agnikumar_G._Vedeshwar dbr:Semiconductor_characterization_techniques dbr:Cobalt(III)_chloride dbr:Argonium dbr:Synthesis_of_hexagonal_boron_nitride dbr:Mars_ocean_hypothesis dbr:Nanostructured_film dbr:Glossary_of_microelectronics_manufacturing_terms dbr:Microelectromechanical_systems dbr:Exchange_spring_magnet dbr:Lanthanum_aluminate-strontium_titanate_interface dbr:MIAMI_Facilities dbr:Kepler-90h dbr:Electrolytic_iron dbr:Rugate_filter dbr:Plastic_coating dbr:Umbriel_(moon) dbr:NASLA dbr:Hollow_atoms dbr:MOSFET_applications dbr:Sputter
is foaf:primaryTopic of	wikipedia-en:Sputtering