Browse using
OpenLink Faceted Browser
OpenLink Structured Data Editor
LodLive Browser
Formats
RDF:
N-Triples
N3
Turtle
JSON
XML
OData:
Atom
JSON
Microdata:
JSON
HTML
Embedded:
JSON
Turtle
Other:
CSV
JSON-LD
Faceted Browser
Sparql Endpoint
About:
Reactive-ion etching
An Entity of Type:
Thing
,
from Named Graph:
http://dbpedia.org
,
within Data Space:
dbpedia.org
Технологія видалення матеріалу підкладки в мікроелектроніці за допомогою хімічно активної плазми
Property
Value
dbo:
description
технологія видалення матеріалу підкладки в мікроелектроніці за допомогою хімічно активної плазми
(uk)
Verfahren in der Halbleitertechnologie
(de)
technique de gravure sèche des semi-conducteurs
(fr)
és una tecnologia de gravat utilitzada en la microfabricació.
(ca)
технологія видалення матеріалу підкладки в мікроелектроніці за допомогою хімічно активної плазми
(uk)
Verfahren in der Halbleitertechnologie
(de)
technique de gravure sèche des semi-conducteurs
(fr)
és una tecnologia de gravat utilitzada en la microfabricació.
(ca)
dbo:
thumbnail
wiki-commons
:Special:FilePath/Reactive_Ion_Etcher.jpg?width=300
dbo:
wikiPageExternalLink
http://www.oxfordplasma.de/process/sibo_1.htm
http://www.plasmaetch.com/reactive-ion-etching-systems-rie.php
https://cleanroom.byu.edu/rie-etching
https://www.purdue.edu/discoverypark/birck/files/Plasma_RIE_Etching_Fundamentals_and_Applications.pdf
dbo:
wikiPageWikiLink
dbr
:File:Reactive_Ion_Etcher.JPG
dbr
:File:Rieoperation.svg
dbr
:Isotropy
dbr
:Plasma_etcher
dbr
:Magnetic_field
dbr
:Plasma_(physics)
dbr
:Vacuum
dbr
:Vacuum_pump
dbr
:Chemical_reaction
dbr
:Ion
dbc
:Etching_(microfabrication)
dbr
:Deep_reactive-ion_etching
dbr
:Wafer_(electronics)
dbr
:Silicon
dbr
:Inductively_coupled_plasma
dbr
:Isotropic_etching
dbr
:Dry_etching
dbr
:Kinetic_energy
dbr
:Electromagnetic_field
dbr
:Microfabrication
dbc
:Plasma_processing
dbc
:Semiconductor_device_fabrication
dbr
:Pressure
dbr
:Chemical_milling
dbr
:Torr
dbr
:Etching_(microfabrication)
dbr
:Sulfur_hexafluoride
dbr
:Anisotropic
dbr
:Electric_field
dbr
:Watt
dbr
:Radio_frequency
dbr
:ISM_band
dbr
:Megahertz
dbr
:Isotropic
dbr
:Sputter
dbr
:File:Etching_wet-chemical_vs_rie_(EN).svg
dbp:
wikiPageUsesTemplate
dbt
:Reflist
dbt
:More_citations_needed
dbt
:Short_description
dct:
subject
dbc
:Etching_(microfabrication)
dbc
:Plasma_processing
dbc
:Semiconductor_device_fabrication
gold:
hypernym
dbr
:Technology
rdfs:
label
Reactive-ion etching
(en)
Gravat d'ions reactius
(ca)
Plasma-unterstütztes Ätzen
(de)
Gravure ionique réactive
(fr)
反応性イオンエッチング
(ja)
Реактивное ионное травление
(ru)
Реактивне іонне травлення
(uk)
反应离子刻蚀
(zh)
owl:
sameAs
freebase
:Reactive-ion etching
wikidata
:Reactive-ion etching
dbpedia-de
:Reactive-ion etching
dbpedia-fr
:Reactive-ion etching
dbpedia-zh
:Reactive-ion etching
dbpedia-ja
:Reactive-ion etching
dbpedia-fa
:Reactive-ion etching
dbpedia-ru
:Reactive-ion etching
dbpedia-ca
:Reactive-ion etching
dbpedia-fi
:Reactive-ion etching
dbpedia-uk
:Reactive-ion etching
dbpedia-global
:Reactive-ion etching
prov:
wasDerivedFrom
wikipedia-en
:Reactive-ion_etching?oldid=1291897776&ns=0
foaf:
depiction
wiki-commons
:Special:FilePath/Etching_wet-chemical_vs_rie_(EN).svg
wiki-commons
:Special:FilePath/Reactive_Ion_Etcher.jpg
wiki-commons
:Special:FilePath/Rieoperation.svg
foaf:
isPrimaryTopicOf
wikipedia-en
:Reactive-ion_etching
is
dbo:
product
of
dbr
:SAMCO
is
dbo:
wikiPageDisambiguates
of
dbr
:RIE
is
dbo:
wikiPageRedirects
of
dbr
:Reactive_ion_etch
dbr
:Reactive_ion_etching
is
dbo:
wikiPageWikiLink
of
dbr
:Plasma-activated_bonding
dbr
:Lam_Research
dbr
:Plasma_(physics)
dbr
:Deep_reactive-ion_etching
dbr
:Microlens
dbr
:RIE
dbr
:Xenon_difluoride
dbr
:Sputtering
dbr
:Shallow_trench_isolation
dbr
:Inductively_coupled_plasma
dbr
:Dry_etching
dbr
:Microfabrication
dbr
:Semiconductor_device_fabrication
dbr
:Structural_coloration
dbr
:Thermal_scanning_probe_lithography
dbr
:Titanium_carbide
dbr
:Etching_(microfabrication)
dbr
:Black_silicon
dbr
:Capacitively_coupled_plasma
dbr
:List_of_plasma_physics_articles
dbr
:Slot-waveguide
dbr
:Antenna_effect
dbr
:Gate_oxide
dbr
:Polyferrocenes
dbr
:Probe_tip
dbr
:Microelectromechanical_systems
dbr
:SAMCO
dbr
:Reactive_ion_etch
dbr
:Reactive_ion_etching
is
foaf:
primaryTopic
of
wikipedia-en
:Reactive-ion_etching
This content was extracted from
Wikipedia
and is licensed under the
Creative Commons Attribution-ShareAlike 4.0 International