| dbo:description
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- termine (it)
- terme (fr)
- technical term (en)
- Begriff aus der Halbleitertechnik (de)
- litografia (ca)
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| rdfs:label
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- Next-generation lithography (en)
- Next-Generation-Lithografie (de)
- 次世代リソグラフィ (ja)
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| is dbo:wikiPageDisambiguates
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| is dbo:wikiPageWikiLink
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| is foaf:primaryTopic
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