About: Lithography (microfabrication)

An Entity of Type: Concept, from Named Graph: http://dbpedia.org, within Data Space: dbpedia.org

Property	Value
dbo:wikiPageID	14047880 (xsd:integer)
dbo:wikiPageRevisionID	1056886309 (xsd:integer)
dbp:wikiPageUsesTemplate	dbt:Commons_category
rdf:type	skos:Concept
rdfs:label	Lithography (microfabrication) (en)
skos:broader	dbc:Lithography dbc:Microtechnology dbc:Photographic_processes dbc:Nanotechnology dbc:Semiconductor_device_fabrication
skos:prefLabel	Lithography (microfabrication) (en)
prov:wasDerivedFrom	wikipedia-en:Category:Lithography_(microfabrication)?oldid=1056886309&ns=14
is dbo:wikiPageWikiLink of	dbr:Electron-beam_lithography dbr:Microlithography dbr:X-ray_lithography dbr:Aligner_(semiconductor) dbr:Interference_lithography dbr:Inverse_lithography dbr:Mask_shop dbr:Chemistry_of_photolithography dbr:Optical_proximity_correction dbr:Soft_lithography dbr:Virtual_metrology dbr:Quantum_lithography dbr:Coordinatograph dbr:LIGA dbr:Computational_lithography dbr:Multiple_patterning dbr:Phase-shift_mask dbr:Magnetolithography dbr:Stepper dbr:Microcontact_printing dbr:Micropatterning dbr:Laser_printing_of_single_nanoparticles dbr:Local_oxidation_nanolithography dbr:Alvéole_Lab dbr:Dip-pen_nanolithography dbr:Photoresist dbr:Proximity_effect_(electron_beam_lithography) dbr:Maskless_lithography dbr:Photolithography dbr:Thermal_scanning_probe_lithography dbr:Micralign dbr:Next-generation_lithography dbr:Multilayer_soft_lithography dbr:Photomask dbr:Scanning_probe_lithography dbr:Extreme_ultraviolet_lithography dbr:Immersion_lithography dbr:Off-axis_illumination dbr:Plasmonic_nanolithography dbr:Nanosphere_lithography dbr:Nanofountain_probe dbr:Nanoimprint_lithography dbr:Nanolithography dbr:Multiphoton_lithography dbr:Photoacid dbr:PDMS_stamp dbr:Stencil_lithography dbr:Spacer_patterning
is dcterms:subject of	dbr:Electron-beam_lithography dbr:Microlithography dbr:X-ray_lithography dbr:Aligner_(semiconductor) dbr:Interference_lithography dbr:Inverse_lithography dbr:Mask_shop dbr:Chemistry_of_photolithography dbr:Optical_proximity_correction dbr:Soft_lithography dbr:Virtual_metrology dbr:Quantum_lithography dbr:Coordinatograph dbr:LIGA dbr:Computational_lithography dbr:Multiple_patterning dbr:Phase-shift_mask dbr:Magnetolithography dbr:Stepper dbr:Microcontact_printing dbr:Micropatterning dbr:Laser_printing_of_single_nanoparticles dbr:Local_oxidation_nanolithography dbr:Alvéole_Lab dbr:Dip-pen_nanolithography dbr:Photoresist dbr:Proximity_effect_(electron_beam_lithography) dbr:Maskless_lithography dbr:Photolithography dbr:Thermal_scanning_probe_lithography dbr:Micralign dbr:Next-generation_lithography dbr:Multilayer_soft_lithography dbr:Photomask dbr:Scanning_probe_lithography dbr:Extreme_ultraviolet_lithography dbr:Immersion_lithography dbr:Off-axis_illumination dbr:Plasmonic_nanolithography dbr:Nanosphere_lithography dbr:Nanofountain_probe dbr:Nanoimprint_lithography dbr:Nanolithography dbr:Multiphoton_lithography dbr:Photoacid dbr:PDMS_stamp dbr:Stencil_lithography dbr:Spacer_patterning
is skos:broader of	dbc:International_Technology_Roadmap_for_Semiconductors_lithography_nodes