About: Off-axis illumination

An Entity of Type: Thing, from Named Graph: http://dbpedia.org, within Data Space: dbpedia.org

Optical system setup in photolithography

Property Value
dbo:description
  • optical system setup in photolithography (en)
dbo:wikiPageWikiLink
dbp:wikiPageUsesTemplate
dct:subject
gold:hypernym
rdfs:label
  • Off-axis illumination (en)
  • Schrägbeleuchtung (de)
owl:sameAs
prov:wasDerivedFrom
foaf:isPrimaryTopicOf
is dbo:wikiPageWikiLink of
is foaf:primaryTopic of
Powered by OpenLink Virtuoso    This material is Open Knowledge     W3C Semantic Web Technology     This material is Open Knowledge    Valid XHTML + RDFa
This content was extracted from Wikipedia and is licensed under the Creative Commons Attribution-ShareAlike 4.0 International