About: Optical proximity correction

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Photolithography enhancement technique

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  • és una tècnica de millora de la fotolitografia que s'utilitza habitualment per compensar els errors d'imatge a causa dels efectes de la difracció o del procés. (ca)
  • photolithography enhancement technique (en)
  • Verfahren zur Korrektur von Abbildungsfehlern bei Photomasken (de)
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  • Optical proximity correction (en)
  • Correcció de proximitat òptica (ca)
  • Optical proximity correction (de)
  • Correction optique de proximité (fr)
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