About: Immersion lithography

Property	Value
dbo:description	Technik im Produktionsprozess der Mikroelektronik (de) procés litogràfic (ca) photolithography technique for manufacturing integrated circuits (en)
dbo:thumbnail	wiki-commons:Special:FilePath/Immersion_lithography_illustration.svg?width=300
dbo:wikiPageInterLanguageLink	dbpedia-ja:液浸
dbo:wikiPageWikiLink	dbr:Numerical_aperture dbr:Refractive_index dbr:Angular_resolution dbr:Multiple_patterning dbr:Ultraviolet dbr:ASML_Holding dbr:Oil_immersion dbr:Silicon dbr:Photoresist dbr:Photolithography dbr:Ghavam_Shahidi dbc:Lithography_(microfabrication) dbr:IBM dbc:Taiwanese_inventions dbr:Nikon dbr:Argon_fluoride_laser dbr:Water_immersion_objective dbr:Line-space dbr:Optical_lithography dbr:Burn_J._Lin dbr:Antireflection dbr:Polarization_effect dbr:20nm dbr:File:Immersion_lithography_illustration.svg dbr:File:Immersion_tool_throughput.png dbr:File:LELELE_patterning.png dbr:File:Pitch_splitting.png
dbp:date	November 2020 (en)
dbp:reason	"However" implies a contrast, but both sentences describe advantages. (en)
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dct:subject	dbc:Lithography_(microfabrication) dbc:Taiwanese_inventions
gold:hypernym	dbr:Technique
rdfs:label	Immersion lithography (en) Immersionslithografie (de) Immersielithografie (nl) 액침 노광 (ko) Імерсія (оптика) (uk) Иммерсионная литография (ru)
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