About: Multiple patterning

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Technique used to increase the number of structures that may be contained on a microchip

Property	Value
dbo:description	Technique used to increase the number of structures that may be contained on a microchip (en) estampació múltiple per a fabricar IC (ca) технология фотолитографии, увеличивающая разрешение изображения, формируемых на полупроводнковой пластине при производстве микросхем за счёт нескольких проходов (ru)
dbo:thumbnail	wiki-commons:Special:FilePath/Different_multipatterning_techniques.png?width=300
dbo:wikiPageWikiLink	dbr:Numerical_aperture dbr:Spacer_patterning dbr:Random-access_memory dbc:Indian_inventions dbr:Intel dbr:Immersion_lithography dbr:Photolithography dbr:Stepper dbc:Lithography_(microfabrication) dbr:Electron-beam_lithography dbr:Micron_Technology dbr:TSMC dbr:Point_spread_function dbr:Hardmask dbr:Extreme_ultraviolet_lithography dbr:Next-generation_lithography dbr:FinFET dbr:Gurtej_Sandhu dbr:DRAM dbr:EUV dbr:EUVL dbr:Moore's_Law dbr:NAND_flash dbr:32_nanometer dbr:File:28_nm_pitch_aggressive_multipatterning.png dbr:File:2D_Layout_Decomposition.png dbr:File:2D_dense_pattern_rounding.png dbr:File:Array-specific_illuminations.png dbr:File:Cut_overlay_issues.png dbr:File:DUV_vs_EUV_4_masks.png dbr:File:Different_multipatterning_techniques.png dbr:File:Different_orientation_illuminations.png dbr:File:EUV_Stochastic_Limits.png dbr:File:Forbidden_diagonal_cuts.png dbr:File:Grid_selection_by_Spacer_patterning.png dbr:File:Honeycomb_structure_patterning.png dbr:File:Illuminations_for_multipitch_pattern.png dbr:File:LE4_for_pitch_division_by_3.png dbr:File:LELELE_or_SID.png dbr:File:LELE_SID_cut.png dbr:File:LELE_cut_for_vias.png dbr:File:Non-ideal_LE3.png dbr:File:SADP_flow_with_two_depositions.png dbr:File:SALELE_at_a_glance.png dbr:File:SAQP_flow_for_SAB.png dbr:File:SAQP_with_selective_SADP_blocking.png dbr:File:SID_SADP_triple_patterning.png dbr:File:SID_SADP_vs_SATP.png dbr:File:SID_after_SIM.png dbr:File:SRAF_OPC_Hotspot.png dbr:File:Self-aligned_blocking.png dbr:File:Self-aligned_via_patterning.png dbr:File:Spacer_Patterning.JPG dbr:File:Split_pattern_recombination_by_DSA.png dbr:File:Tilted_ion_implantation_patterning.png dbr:File:Trench_doubling.svg dbr:5_nm dbr:7_nm dbr:7nm dbr:File:Pitch_splitting.png
dbp:wikiPageUsesTemplate	dbt:Reflist dbt:Clear dbt:Vanchor dbt:Jargon dbt:Short_description
dct:subject	dbc:Lithography_(microfabrication)
gold:hypernym	dbr:Technologies
rdfs:label	Multiple patterning (en) Multiple patterning (ca) Mehrfachstrukturierung (de) 多重图形 (zh)
owl:sameAs	freebase:Multiple patterning wikidata:Multiple patterning dbpedia-de:Multiple patterning dbpedia-zh:Multiple patterning dbpedia-ca:Multiple patterning dbpedia-global:Multiple patterning
prov:wasDerivedFrom	wikipedia-en:Multiple_patterning?oldid=1294194523&ns=0
foaf:depiction	wiki-commons:Special:FilePath/Pitch_splitting.png wiki-commons:Special:FilePath/Different_orientation_illuminations.png wiki-commons:Special:FilePath/28_nm_pitch_aggressive_multipatterning.png wiki-commons:Special:FilePath/2D_Layout_Decomposition.png wiki-commons:Special:FilePath/2D_dense_pattern_rounding.png wiki-commons:Special:FilePath/Array-specific_illuminations.png wiki-commons:Special:FilePath/Cut_overlay_issues.png wiki-commons:Special:FilePath/DUV_vs_EUV_4_masks.png wiki-commons:Special:FilePath/Different_multipatterning_techniques.png wiki-commons:Special:FilePath/EUV_Stochastic_Limits.png wiki-commons:Special:FilePath/EUV_triple_patterning_vs_DUV_quadruple_patterning.png wiki-commons:Special:FilePath/Forbidden_diagonal_cuts.png wiki-commons:Special:FilePath/Gridded_cut_selection_(3_masks).png wiki-commons:Special:FilePath/Honeycomb_structure_patterning.png wiki-commons:Special:FilePath/Illuminations_for_multipitch_pattern.png wiki-commons:Special:FilePath/LE4_for_pitch_division_by_3.png wiki-commons:Special:FilePath/LELELE_or_SID.png wiki-commons:Special:FilePath/Non-ideal_LE3.png wiki-commons:Special:FilePath/SADP_flow_with_two_depositions.png wiki-commons:Special:FilePath/SALELE_at_a_glance.png wiki-commons:Special:FilePath/SAQP_flow_for_SAB.png wiki-commons:Special:FilePath/SID_SADP_triple_patterning.png wiki-commons:Special:FilePath/SID_SADP_vs_SATP.png wiki-commons:Special:FilePath/SID_after_SIM.png wiki-commons:Special:FilePath/SRAF_OPC_Hotspot.png wiki-commons:Special:FilePath/Self-aligned_blocking.png wiki-commons:Special:FilePath/Self-aligned_via_patterning.png wiki-commons:Special:FilePath/Spacer_Patterning.jpg wiki-commons:Special:FilePath/Split_pattern_recombination_by_DSA.png wiki-commons:Special:FilePath/Stitch_Double_Patterning.png wiki-commons:Special:FilePath/Tilted_ion_implantation_patterning.png wiki-commons:Special:FilePath/Trench_doubling.svg
foaf:isPrimaryTopicOf	wikipedia-en:Multiple_patterning
is dbo:wikiPageDisambiguates of	dbr:Pattern_(disambiguation)
is dbo:wikiPageRedirects of	dbr:Multi-patterning dbr:Multipatterning dbr:Double_patterning dbr:SAQP
is dbo:wikiPageWikiLink of	dbr:Spacer_patterning dbr:GlobalFoundries dbr:ASM_International dbr:Pattern_(disambiguation) dbr:Double_exposure_(disambiguation) dbr:Maskless_lithography dbr:Immersion_lithography dbr:Photolithography dbr:Photomask dbr:14_nm_process dbr:Optical_proximity_correction dbr:Extreme_ultraviolet_lithography dbr:Next-generation_lithography dbr:10_nm_process dbr:7_nm_process dbr:SADP dbr:3_nm_process dbr:Gurtej_Sandhu dbr:Multi-patterning dbr:Multipatterning dbr:Double_patterning dbr:SAQP
is foaf:primaryTopic of	wikipedia-en:Multiple_patterning