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- In technology, soft lithography is a family of techniques for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably PDMS. Soft lithography is generally used to construct features measured on the micrometer to nanometer scale. According to Rogers and Nuzzo (2005), development of soft lithography expanded rapidly from 1995 to 2005. Soft lithography tools are now commercially available. (en)
- ソフトリソグラフィ(soft lithography)とは微細な鋳型にシリコーン樹脂などの「やわらかいもの」を流し込み、そのまま硬化させることで微細な立体構造を転写する技術。 (ja)
- 軟微影技術(soft lithography)，又稱軟微影製程、可撓性奈米轉印、軟蝕刻技術或軟光刻技術，是一種用軟性高分子材質做成的可撓性刻印的模具，在模具上面塗佈具有自我組合性能的單元分子(SAM， Self-Assembly Monomer)後，像印章一樣，在鍍金的薄膜基板上微壓，把奈米圖形模子上面凸出部分的自我組合性能的單元分子(SAM)像油墨一樣的印在金薄膜上。 (zh)
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- In technology, soft lithography is a family of techniques for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably PDMS. Soft lithography is generally used to construct features measured on the micrometer to nanometer scale. According to Rogers and Nuzzo (2005), development of soft lithography expanded rapidly from 1995 to 2005. Soft lithography tools are now commercially available. (en)
- ソフトリソグラフィ(soft lithography)とは微細な鋳型にシリコーン樹脂などの「やわらかいもの」を流し込み、そのまま硬化させることで微細な立体構造を転写する技術。 (ja)
- 軟微影技術(soft lithography)，又稱軟微影製程、可撓性奈米轉印、軟蝕刻技術或軟光刻技術，是一種用軟性高分子材質做成的可撓性刻印的模具，在模具上面塗佈具有自我組合性能的單元分子(SAM， Self-Assembly Monomer)後，像印章一樣，在鍍金的薄膜基板上微壓，把奈米圖形模子上面凸出部分的自我組合性能的單元分子(SAM)像油墨一樣的印在金薄膜上。 (zh)
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- ソフトリソグラフィ (ja)
- Soft lithography (en)
- 軟微影技術 (zh)
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