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Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy. Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL (or thermochemical nanolithography) where the goal is to influence the local chemistry, and thermal dip-pen lithography as an additive technique.

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  • Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy. Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL (or thermochemical nanolithography) where the goal is to influence the local chemistry, and thermal dip-pen lithography as an additive technique. (en)
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  • Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy. Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL (or thermochemical nanolithography) where the goal is to influence the local chemistry, and thermal dip-pen lithography as an additive technique. (en)
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  • Thermal scanning probe lithography (en)
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