About: Interference lithography

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Technique for patterning photomasks

Property	Value
dbo:description	technique for patterning photomasks (en) és una tècnica per modelar matrius regulars de característiques fines. (ca)
dbo:wikiPageExternalLink	https://spie.org/documents/Newsroom/Imported/006543/006543_10.pdf https://www.ise.fraunhofer.de/content/dam/ise/de/documents/infomaterial/brochures/photovoltaik/13_e_Flyer_Microstructured%20Surfaces_web.pdf
dbo:wikiPageWikiLink	dbr:Fermi–Dirac_statistics dbr:Beam_splitter dbr:Ionizing_radiation dbr:Optics dbr:Planck_constant dbr:Prism_(optics) dbr:Electronvolt dbr:Diffraction_grating dbr:Coherence_(physics) dbr:Photoresist dbr:Immersion_lithography dbr:Photolithography dbr:Photomask dbr:Light dbc:Lithography_(microfabrication) dbr:Holography dbr:Electron_holography dbr:Nanometer dbr:Interferometry dbr:Coulomb's_law dbr:Extreme_ultraviolet_lithography dbr:Nanoimprint_lithography dbr:Lloyd's_mirror dbr:De_Broglie_wave dbr:Electron_beam_lithography dbr:De_Broglie_relation
dbp:wikiPageUsesTemplate	dbt:Reflist dbt:Use_American_English dbt:Mvar dbt:Short_description
dct:subject	dbc:Lithography_(microfabrication)
gold:hypernym	dbr:Technique
rdfs:label	Interference lithography (en) Litografia interferencyjna (pl)
owl:sameAs	freebase:Interference lithography wikidata:Interference lithography dbpedia-pl:Interference lithography dbpedia-global:Interference lithography
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