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About:
Etching (microfabrication)
An Entity of Type:
Concept
,
from Named Graph:
http://dbpedia.org
,
within Data Space:
dbpedia.org
Property
Value
dbo:
wikiPageID
14641299
(xsd:integer)
dbo:
wikiPageRevisionID
474557107
(xsd:integer)
dbp:
wikiPageUsesTemplate
dbt
:Commons_cat
dbt
:Cat_main
rdf:
type
skos
:Concept
rdfs:
label
Etching (microfabrication)
(en)
skos:
broader
dbc
:Etching
dbc
:Microtechnology
dbc
:Semiconductor_device_fabrication
skos:
prefLabel
Etching (microfabrication)
(en)
prov:
wasDerivedFrom
wikipedia-en
:Category:Etching_(microfabrication)?oldid=474557107&ns=14
is
dbo:
wikiPageWikiLink
of
dbr
:Deep_reactive-ion_etching
dbr
:Wright_etch
dbr
:Dry_etching
dbr
:Advanced_silicon_etching
dbr
:Reactive-ion_etching
dbr
:Atomic_layer_etching
dbr
:Buffered_oxide_etch
dbr
:Etching_(microfabrication)
dbr
:Plasma-immersion_ion_implantation
dbr
:Undercut_(etching)
is
dcterms:
subject
of
dbr
:Deep_reactive-ion_etching
dbr
:Wright_etch
dbr
:Dry_etching
dbr
:Advanced_silicon_etching
dbr
:Reactive-ion_etching
dbr
:Atomic_layer_etching
dbr
:Buffered_oxide_etch
dbr
:Etching_(microfabrication)
dbr
:Plasma-immersion_ion_implantation
dbr
:Undercut_(etching)
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and is licensed under the
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