About: Deep reactive-ion etching

An Entity of Type: Thing, from Named Graph: http://dbpedia.org, within Data Space: dbpedia.org

Highly anisotropic etch process

thumbnail
Property Value
dbo:description
  • highly anisotropic etch process (en)
  • Trockenätzprozess für die Herstellung von Mikrostrukturen in Silicium (de)
  • és un procés de gravat altament anisotròpic. (ca)
dbo:thumbnail
dbo:wikiPageWikiLink
dbp:wikiPageUsesTemplate
dct:subject
rdfs:label
  • Deep reactive-ion etching (en)
  • Reaktives Ionentiefenätzen (de)
  • Gravure ionique réactive profonde (fr)
  • 深掘りRIE (ja)
  • Corrosão profunda assistida por íons (pt)
  • Djup reaktiv jonetsning (sv)
owl:sameAs
prov:wasDerivedFrom
foaf:depiction
foaf:isPrimaryTopicOf
is dbo:product of
is dbo:wikiPageRedirects of
is dbo:wikiPageWikiLink of
is foaf:primaryTopic of
Powered by OpenLink Virtuoso    This material is Open Knowledge     W3C Semantic Web Technology     This material is Open Knowledge    Valid XHTML + RDFa
This content was extracted from Wikipedia and is licensed under the Creative Commons Attribution-ShareAlike 4.0 International