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About:
Advanced silicon etching
An Entity of Type:
Thing
,
from Named Graph:
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within Data Space:
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Technology in semiconductor device fabrication
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dbo:
description
فناوریی در برساخت افزاره نیمرسانا
(fa)
Technologie dans la technologie des semi-conducteurs
(fr)
Technologie in der Halbleitertechnik
(de)
Technology in semiconductor device fabrication
(en)
dbo:
wikiPageExternalLink
http://www.stsystems.com/pages/process_content.asp%3FmenuID=33&subID=80&menuTitle=Technical%20Papers&mainMenuTitle=Publications
https://web.archive.org/web/20061109155214/http:/www.stsystems.com/pages/process_content.asp%3Fpreview=YES&contID=1071&menuID=33&subID=80&menuTitle=Technical%20Papers&mainMenuTitle=Publications&contTitle=Technical%20Papers
https://web.archive.org/web/20070702162101/http:/www.stsystems.com/pages/process_content.asp%3FmenuID=33&subID=80&menuTitle=Technical+Papers&mainMenuTitle=Publications
dbo:
wikiPageWikiLink
dbc
:Microtechnology
dbr
:Plasma_(physics)
dbr
:Passivation_(chemistry)
dbc
:Etching_(microfabrication)
dbr
:Deep_reactive-ion_etching
dbr
:Octafluorocyclobutane
dbc
:Semiconductor_device_fabrication
dbr
:Anisotropy
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dct:
subject
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:Microtechnology
dbc
:Etching_(microfabrication)
dbc
:Semiconductor_device_fabrication
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Advanced silicon etching
(en)
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:Advanced silicon etching
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:Advanced silicon etching
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