About: Atomic layer etching

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半導体製造工程における技術

Property	Value
dbo:description	半導体製造工程における技術 (ja) 半導体製造工程における技術 (ja)
dbo:wikiPageExternalLink	http://jss.ecsdl.org/content/4/6.toc http://scitation.aip.org/content/avs/journal/jvsta/33/2/10.1116/1.4913379
dbo:wikiPageWikiLink	dbr:Atomic_layer_deposition dbc:Chemical_processes dbc:Industrial_processes dbc:Etching_(microfabrication) dbr:Argon dbr:Chlorine dbr:Intel dbr:Semiconductor_device_fabrication dbc:Semiconductor_device_fabrication dbr:High-κ_dielectric dbr:Reactive_ion_etching
dbp:wikiPageUsesTemplate	dbt:Reflist dbt:Short_description
dct:subject	dbc:Chemical_processes dbc:Industrial_processes dbc:Etching_(microfabrication) dbc:Semiconductor_device_fabrication
gold:hypernym	dbr:Technique
rdfs:label	Atomic layer etching (en) 原子層エッチング (ja)
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foaf:isPrimaryTopicOf	wikipedia-en:Atomic_layer_etching
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is foaf:primaryTopic of	wikipedia-en:Atomic_layer_etching

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