About: Capacitively coupled plasma

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Type of industrial plasma source

Property	Value
dbo:description	type of industrial plasma source (en)
dbo:wikiPageWikiLink	dbr:Debye_sheath dbr:Collision dbr:Open-circuit_voltage dbr:Capacitor dbr:Electron dbr:Plasma_etching dbr:Plasma_(physics) dbr:Plasma_source dbr:Ion dbr:Alternating_current dbc:Electronics_manufacturing dbr:Sputtering dbr:Inductively_coupled_plasma dbr:Avalanche_breakdown dbr:Electrode dbr:Electron_avalanche dbr:Microfabrication dbr:Short_circuit dbr:Direct_current dbr:Plasma-enhanced_chemical_vapor_deposition dbr:Etching_(microfabrication) dbr:Multipactor_effect dbr:Reactive-ion_etching dbr:Electric_field dbr:Radio_frequency dbc:Plasma_physics dbr:List_of_plasma_physics_articles dbr:Secondary_electrons dbr:Ground_(electricity) dbr:ISM_band dbr:Atmosphere_(unit) dbr:Thin_film_deposition dbr:Conductive
dbp:wikiPageUsesTemplate	dbt:Reflist dbt:Refimprove dbt:Short_description
dct:subject	dbc:Plasma_types dbc:Electronics_manufacturing
rdfs:label	Capacitively coupled plasma (en) 容量結合プラズマ (ja)
owl:sameAs	freebase:Capacitively coupled plasma wikidata:Capacitively coupled plasma dbpedia-ja:Capacitively coupled plasma dbpedia-global:Capacitively coupled plasma
prov:wasDerivedFrom	wikipedia-en:Capacitively_coupled_plasma?oldid=1275902717&ns=0
foaf:isPrimaryTopicOf	wikipedia-en:Capacitively_coupled_plasma
is dbo:wikiPageDisambiguates of	dbr:CCP
is dbo:wikiPageRedirects of	dbr:Capcitively_coupled_plasma
is dbo:wikiPageWikiLink of	dbr:Plasma-immersion_ion_implantation dbr:Plasma_(physics) dbr:Electrodeless_plasma_thruster dbr:Inductively_coupled_plasma dbr:Index_of_physics_articles_(C) dbr:Electrodeless_plasma_excitation dbr:Multipactor_effect dbr:PK-3_Plus_(ISS_experiment) dbr:List_of_plasma_physics_articles dbr:CCP dbr:Capcitively_coupled_plasma
is foaf:primaryTopic of	wikipedia-en:Capacitively_coupled_plasma