Waterloo County was a county in the Canadian province of Ontario from 1853 until 1973. It was the direct predecessor of the Regional Municipality of Waterloo. Situated on a subset of land within the Haldimand Tract, the traditional territory of the Attawandaron, Anishinaabe and Haudenosaunee peoples, Waterloo County consisted of five townships: Woolwich, Wellesley, Wilmot, Waterloo, and North Dumfries. The major population centres were Waterloo, Kitchener (known as Berlin prior to 1916), Preston, Hespeler, Blair, and Doon in Waterloo township; Galt in North Dumfries; Elmira in Woolwich; and New Hamburg in Wilmot. All are now part of the Regional Municipality.