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- Richard Stephen Muller (born May 5, 1933) is an American professor in the Electrical Engineering and Computer Science Department of the University of California at Berkeley. He made contributions to the founding and growth of the field of MicroElectromechanical Systems (MEMS). Together with student, Roger T. Howe, he made the initial seminal contribution of polysilicon sacrificially-released beams in 1982. This led to a class of micromanufacturing processes called surface micromachining. These processes preceded the creation of low cost, mass-produced commercial micro accelerometers, which are used in automotive collision sensors for airbag deployment. Together with Richard M. White, he created BSAC (Berkeley Sensor & Actuator Center), an organization that produced many generations of academic researchers and intellectual properties in the MEMS field. MEMS is an activity that in 2013 accounted for multi-billion dollar revenue worldwide. Muller was elected a member of the US National Academy of Engineering in 1992 for contributions to the technology and design of integrated electronic sensors. (en)
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- Richard Stephen Muller (en)
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- Richard Stephen Muller (born May 5, 1933) is an American professor in the Electrical Engineering and Computer Science Department of the University of California at Berkeley. He made contributions to the founding and growth of the field of MicroElectromechanical Systems (MEMS). Together with student, Roger T. Howe, he made the initial seminal contribution of polysilicon sacrificially-released beams in 1982. This led to a class of micromanufacturing processes called surface micromachining. These processes preceded the creation of low cost, mass-produced commercial micro accelerometers, which are used in automotive collision sensors for airbag deployment. Together with Richard M. White, he created BSAC (Berkeley Sensor & Actuator Center), an organization that produced many generations of acad (en)
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