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Spherical surface acoustic wave sensors use a type of surface acoustic wave (SAW) that travels along the surface of a medium exhibiting elasticity with exponentially decaying amplitude along depth. MEMS-IDT technology allows the use of SAW waves to sense various gases. Sensitivity up to 10 ppm of hydrogen using a spherical Ball SAW device is obtained.

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  • Spherical surface acoustic wave sensors use a type of surface acoustic wave (SAW) that travels along the surface of a medium exhibiting elasticity with exponentially decaying amplitude along depth. MEMS-IDT technology allows the use of SAW waves to sense various gases. Sensitivity up to 10 ppm of hydrogen using a spherical Ball SAW device is obtained. (en)
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  • Spherical surface acoustic wave sensors use a type of surface acoustic wave (SAW) that travels along the surface of a medium exhibiting elasticity with exponentially decaying amplitude along depth. MEMS-IDT technology allows the use of SAW waves to sense various gases. Sensitivity up to 10 ppm of hydrogen using a spherical Ball SAW device is obtained. (en)
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  • Spherical surface acoustic wave (SAW) sensor (en)
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