About: Plasma-enhanced chemical vapor deposition

Property	Value
dbo:description	és un procés de deposició de vapor químic que s'utilitza per dipositar pel·lícules primes des d'un estat gasós (vapor) a un estat sòlid sobre un substrat. (ca) Méthode de revêtement (fr) Proces osadzania cienkich warstw (pl) Processo de deposição química (pt) Ultra thin coating process (en) Verfahren zum Beschichten (de)
dbo:thumbnail	wiki-commons:Special:FilePath/STS_multiplex_PECVD_machine_at_LAAS_0495.jpg?width=300
dbo:wikiPageWikiLink	dbr:ISM_band dbr:Substrate_(materials_science) dbr:Vapor dbr:Dichlorosilane dbr:Silicon_nitride dbr:List_of_plasma_physics_articles dbr:Hydrogen dbr:Nitrogen dbr:Oxygen dbr:Silicon dbr:Silane dbr:Radio_frequency dbr:Ammonia dbr:Hertz dbr:Plasma_(physics) dbr:Nitrous_oxide dbc:Plasma_processing dbr:Gas dbr:Solid dbr:Direct_current dbr:Silicon_dioxide dbr:Chemical_vapor_deposition dbr:Passivation_(chemistry) dbr:Chemical_reaction dbr:Electrode dbr:Alternating_current dbr:Sputtering dbc:Plasma_physics dbr:Silanol dbr:Sputter_deposition dbr:Torr dbc:Thin_film_deposition dbc:Semiconductor_device_fabrication dbr:Volts dbr:LEPECVD dbr:Low-Energy_Plasma-Enhanced_Chemical_Vapor_Deposition dbr:Tetraethylorthosilicate dbr:File:Argonne's_Tribology_Lab_Plasma-Assisted_Chemical-Vapor_Deposition.jpg dbr:File:Richard_Swann_glow_discharge_photo_1.jpg dbr:File:Richard_Swann_glow_discharge_photo_2.jpg dbr:File:Richard_Swann_glow_discharge_photo_3.jpg dbr:File:STS_multiplex_PECVD_machine_at_LAAS_0495.jpg
dbp:wikiPageUsesTemplate	dbt:Citation_needed dbt:More_citations_needed dbt:Reflist dbt:Short_description
dct:subject	dbc:Plasma_processing dbc:Chemical_vapor_deposition dbc:Thin_film_deposition dbc:Semiconductor_device_fabrication
gold:hypernym	dbr:Process
rdfs:label	Plasma-enhanced chemical vapor deposition (en) Deposició química de vapor millorada per plasma (ca) Plasmaunterstützte chemische Gasphasenabscheidung (de) Dépôt chimique en phase vapeur assisté par plasma (fr) プラズマCVD (ja) Deposizione chimica da vapore potenziata dal plasma (it) Plasma-enhanced chemical vapor deposition (nl) Плазменно-химическое осаждение из газовой фазы (ru)
owl:sameAs	yago-res:Plasma-enhanced chemical vapor deposition freebase:Plasma-enhanced chemical vapor deposition wikidata:Plasma-enhanced chemical vapor deposition dbpedia-de:Plasma-enhanced chemical vapor deposition dbpedia-it:Plasma-enhanced chemical vapor deposition dbpedia-nl:Plasma-enhanced chemical vapor deposition dbpedia-fr:Plasma-enhanced chemical vapor deposition dbpedia-ja:Plasma-enhanced chemical vapor deposition dbpedia-ru:Plasma-enhanced chemical vapor deposition dbpedia-ca:Plasma-enhanced chemical vapor deposition dbpedia-fa:Plasma-enhanced chemical vapor deposition dbpedia-sk:Plasma-enhanced chemical vapor deposition dbpedia-global:Plasma-enhanced chemical vapor deposition
prov:wasDerivedFrom	wikipedia-en:Plasma-enhanced_chemical_vapor_deposition?oldid=1307344269&ns=0
foaf:depiction	wiki-commons:Special:FilePath/Argonne's_Tribology_L...ssisted_Chemical-Vapor_Deposition.jpg wiki-commons:Special:FilePath/Richard_Swann_glow_discharge_photo_1.jpg wiki-commons:Special:FilePath/Richard_Swann_glow_discharge_photo_2.jpg wiki-commons:Special:FilePath/Richard_Swann_glow_discharge_photo_3.jpg wiki-commons:Special:FilePath/STS_multiplex_PECVD_machine_at_LAAS_0495.jpg
foaf:isPrimaryTopicOf	wikipedia-en:Plasma-enhanced_chemical_vapor_deposition
is dbo:product of	dbr:SAMCO
is dbo:wikiPageRedirects of	dbr:PECVD dbr:Plasma-enhanced_chemical_vapour_deposition dbr:Plasma_Enhanced_CVD dbr:Plasma_Enhanced_Chemical_Vapor_Deposition dbr:Plasma_Enhanced_Chemical_Vapour_Deposition dbr:Plasma_deposition_process dbr:Plasma_enhanced_chemical_vapour_deposition dbr:Remote_plasma-enhanced_CVD
is dbo:wikiPageWikiLink of	dbr:Boron_nitride dbr:Nitrogen_trifluoride dbr:Silicon_nitride dbr:Amorphous_silicon dbr:Trimethylsilane dbr:Nicolas_Wöhrl dbr:SAMCO dbr:Transition_metal_dichalcogenide_monolayers dbr:List_of_plasma_physics_articles dbr:Silane dbr:Vacuum_deposition dbr:Plasma_(physics) dbr:Thin-film_solar_cell dbr:Tetrakis(trimethylsilyloxy)silane dbr:Solar_cell dbr:Bifacial_solar_cells dbr:Chemical_vapor_deposition dbr:ASM_International dbr:Precision_glass_moulding dbr:Bis(trimethylsilyl)amine dbr:Hexamethyldisiloxane dbr:Piston_ring dbr:Capacitively_coupled_plasma dbr:Epitaxial_wafer dbr:P2i dbr:Low-energy_plasma-enhanced_chemical_vapor_deposition dbr:Nano-PSI dbr:Combustion_chemical_vapor_deposition dbr:Novellus_Systems dbr:Microelectromechanical_systems dbr:Thin-film-transistor_liquid-crystal_display dbr:Ultra-high-temperature_ceramics dbr:MOSFET_applications dbr:PECVD dbr:Plasma-enhanced_chemical_vapour_deposition dbr:Plasma_Enhanced_CVD dbr:Plasma_Enhanced_Chemical_Vapor_Deposition dbr:Plasma_Enhanced_Chemical_Vapour_Deposition dbr:Plasma_deposition_process dbr:Plasma_enhanced_chemical_vapour_deposition dbr:Remote_plasma-enhanced_CVD
is foaf:primaryTopic of	wikipedia-en:Plasma-enhanced_chemical_vapor_deposition