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About: MEMS thermal actuator     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : yago:WikicatActuators, within Data Space : dbpedia.org associated with source document(s)

Type: yago:Actuator102678384yago:Artifact100021939yago:Device103183080yago:Instrumentality103575240yago:Mechanism103738472yago:Object100002684yago:PhysicalEntity100001930deviceyago:Whole100003553yago:WikicatActuators New Facet based on Instances of this Class

A MEMS thermal actuator is a that typically generates motion by thermal expansion amplification. A small amount of thermal expansion of one part of the device translates to a large amount of deflection of the overall device. Usually fabricated out of doped single crystal silicon or polysilicon as a , the increase in temperature can be achieved internally by or something by a heat source capable of locally introducing heat. Microfabricated thermal actuators can be integrated into micromotors.