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Diazonaphthoquinone (DNQ) is a diazo derivative of naphthoquinone. Upon exposure to light, DNQ converts to a derivative that is susceptible to etching. In this way, DNQ has become an important reagent in photoresist technology in the semiconductor industry.

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  • Diazonaphthoquinone (en)
  • ジアゾナフトキノン (ja)
  • 重氮萘醌 (zh)
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  • ジアゾナフトキノン（diazonaphthoquinone, DNQ）はナフトキノンのジアゾ誘導体である。光に曝されると、ウルフ転位によりケテンを形成する。この化学反応は、半導体工業において様々なジアゾナフトキノン誘導体で利用されている。 (ja)
  • 重氮萘醌（英語：diazonaphthoquinone）是萘醌的重氮衍生物。 一旦曝光，它将经历沃尔夫重排反应以形成烯酮。在半导体行业中，各种重氮萘醌的衍生物可被用作光刻胶的感光劑。 在半导体制造的過程中，重氮萘醌的磺酸酯通常會用作光刻胶材料中的正性感光劑。在这种应用中，重氮萘醌會與酚醛树脂混合，以作为溶解抑制剂。在曝光的过程中，部分光刻胶膜會暴露在光线下，而其他部分則不會。在未曝光的區域裡，含有重氮萘醌的光刻胶膜仍然會不溶于水基顯影液中。 而在曝光的區域裡，重氮萘醌會形成烯酮，由此再与环境中的水形成可溶於鹼的茚並羧酸。光刻胶膜中已曝光的區域因而可溶于鹼性溶劑，從而將光刻膠層中的圖形顯現出來。 (zh)
  • Diazonaphthoquinone (DNQ) is a diazo derivative of naphthoquinone. Upon exposure to light, DNQ converts to a derivative that is susceptible to etching. In this way, DNQ has become an important reagent in photoresist technology in the semiconductor industry. (en)
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  • Diazonaphthoquinone.png (en)
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  • Diazonaphthoquinone (DNQ) is a diazo derivative of naphthoquinone. Upon exposure to light, DNQ converts to a derivative that is susceptible to etching. In this way, DNQ has become an important reagent in photoresist technology in the semiconductor industry. Diazonaphthoquinone sulfonic acid esters are components of common photoresist materials. Such photoresists are used in the manufacture of semiconductors. In this application DNQs are mixed with Novolac resin, a type of phenolic polymer. The DNQ functions as a dissolution inhibitor. During the masking/patterning process, portions of the photoresist film are exposed to light while others remain unexposed. In the unexposed regions of the resist film, the DNQ acts as a dissolution inhibitor and the resist remains insoluble in the aqueous base developer. In the exposed regions, the DNQ forms a ketene, which, in turn, reacts with ambient water to form a base soluble indene carboxylic acid. The exposed regions of the photoresist film become soluble in aqueous base; thus allowing the formation of a relief image during development. (en)
  • ジアゾナフトキノン（diazonaphthoquinone, DNQ）はナフトキノンのジアゾ誘導体である。光に曝されると、ウルフ転位によりケテンを形成する。この化学反応は、半導体工業において様々なジアゾナフトキノン誘導体で利用されている。 (ja)
  • 重氮萘醌（英語：diazonaphthoquinone）是萘醌的重氮衍生物。 一旦曝光，它将经历沃尔夫重排反应以形成烯酮。在半导体行业中，各种重氮萘醌的衍生物可被用作光刻胶的感光劑。 在半导体制造的過程中，重氮萘醌的磺酸酯通常會用作光刻胶材料中的正性感光劑。在这种应用中，重氮萘醌會與酚醛树脂混合，以作为溶解抑制剂。在曝光的过程中，部分光刻胶膜會暴露在光线下，而其他部分則不會。在未曝光的區域裡，含有重氮萘醌的光刻胶膜仍然會不溶于水基顯影液中。 而在曝光的區域裡，重氮萘醌會形成烯酮，由此再与环境中的水形成可溶於鹼的茚並羧酸。光刻胶膜中已曝光的區域因而可溶于鹼性溶劑，從而將光刻膠層中的圖形顯現出來。 (zh)
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alternative name
  • 1,2-Naphthoquinone diazide (en)
IUPAC name
  • 2-Diazonaphthalen-1(2H)-one (en)
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