@prefix foaf:	<http://xmlns.com/foaf/0.1/> .
@prefix wikipedia-en:	<http://en.wikipedia.org/wiki/> .
@prefix dbr:	<http://dbpedia.org/resource/> .
wikipedia-en:HARMST	foaf:primaryTopic	dbr:HARMST .
@prefix dbo:	<http://dbpedia.org/ontology/> .
dbr:Aspect_ratio	dbo:wikiPageWikiLink	dbr:HARMST .
@prefix owl:	<http://www.w3.org/2002/07/owl#> .
dbr:HARMST	owl:sameAs	<http://rdf.freebase.com/ns/m.06w5rcx> ,
		dbr:HARMST .
@prefix wikidata:	<http://www.wikidata.org/entity/> .
dbr:HARMST	owl:sameAs	wikidata:Q5628952 ,
		<https://global.dbpedia.org/id/4m1J5> .
@prefix rdfs:	<http://www.w3.org/2000/01/rdf-schema#> .
dbr:HARMST	rdfs:label	"HARMST"@en .
@prefix dct:	<http://purl.org/dc/terms/> .
@prefix dbc:	<http://dbpedia.org/resource/Category:> .
dbr:HARMST	dct:subject	dbc:Materials_science ,
		dbc:Microtechnology .
@prefix prov:	<http://www.w3.org/ns/prov#> .
dbr:HARMST	prov:wasDerivedFrom	<http://en.wikipedia.org/wiki/HARMST?oldid=1249067760&ns=0> .
@prefix gold:	<http://purl.org/linguistics/gold/> .
dbr:HARMST	gold:hypernym	dbr:Acronym ;
	foaf:isPrimaryTopicOf	wikipedia-en:HARMST ;
	dbo:wikiPageWikiLink	dbr:Advanced_Silicon_Etch ,
		dbr:Deep_reactive_ion_etching ,
		dbc:Materials_science ,
		dbr:LIGA ,
		dbc:Microtechnology ,
		dbr:Microelectromechanical_systems ,
		dbr:Aspect_ratio ;
	dbo:description	"fabrication technology"@en ,
		"Technologie"@de ,
		"technologie"@fr .
@prefix dbp:	<http://dbpedia.org/property/> .
@prefix dbt:	<http://dbpedia.org/resource/Template:> .
dbr:HARMST	dbp:wikiPageUsesTemplate	dbt:Reflist ,
		dbt:More_citations_needed ,
		dbt:Engineering-stub .
dbr:Micromachining	dbo:wikiPageWikiLink	dbr:HARMST .