. "994173385"^^ . "35058271"^^ . . . . . . . . . . . . . "MEMS testing"@en . . . . . . "MEMS testing is one of the processes in the development of a MEMS device. It is a collection of testing methods such as electrical, mechanical and environment tests."@en . . . . . . . . . . . . . . . . . . . . "4258"^^ . . "MEMS testing is one of the processes in the development of a MEMS device. It is a collection of testing methods such as electrical, mechanical and environment tests."@en . .