This HTML5 document contains 44 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n8http://dbpedia.org/resource/Arxiv:cond-mat/
dbohttp://dbpedia.org/ontology/
foafhttp://xmlns.com/foaf/0.1/
n12http://dbpedia.org/resource/File:
n9https://global.dbpedia.org/id/
rdfshttp://www.w3.org/2000/01/rdf-schema#
freebasehttp://rdf.freebase.com/ns/
n14http://commons.wikimedia.org/wiki/Special:FilePath/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
owlhttp://www.w3.org/2002/07/owl#
wikipedia-enhttp://en.wikipedia.org/wiki/
dbchttp://dbpedia.org/resource/Category:
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
wikidatahttp://www.wikidata.org/entity/
goldhttp://purl.org/linguistics/gold/
dbrhttp://dbpedia.org/resource/

Statements

Subject Item
dbr:Charge_qubit
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Niemeyer-Dolan_technique
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
dbo:wikiPageRedirects
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Flux_qubit
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Coulomb_blockade
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Dolan_bridge
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
dbo:wikiPageRedirects
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Dolan_bridge_technique
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
dbo:wikiPageRedirects
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Dolan_technique
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
dbo:wikiPageRedirects
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Niemeyer–Dolan_technique
rdf:type
dbo:Software
rdfs:label
Niemeyer–Dolan technique
rdfs:comment
The Niemeyer–Dolan technique, also called the Dolan technique, angular evaporation, or the shadow evaporation technique, is a thin-film lithographic method to create nanometer-sized overlapping structures.
foaf:depiction
n14:TyNiemeyerDolanTechnique.png
dcterms:subject
dbc:Nanoelectronics
dbo:wikiPageID
4294270
dbo:wikiPageRevisionID
1112397002
dbo:wikiPageWikiLink
dbr:Substrate_(materials_science) dbc:Nanoelectronics n8:9901308 dbr:Nanometer dbr:Quantum_dots n12:TyNiemeyerDolanTechnique.png dbr:Thin-film dbr:Nanostructures dbr:Resist dbr:Electronics dbr:Tunnel_junctions dbr:Lithography
owl:sameAs
freebase:m.0bvlmk n9:4t63x wikidata:Q7031672
dbo:thumbnail
n14:TyNiemeyerDolanTechnique.png?width=300
dbo:abstract
The Niemeyer–Dolan technique, also called the Dolan technique, angular evaporation, or the shadow evaporation technique, is a thin-film lithographic method to create nanometer-sized overlapping structures. This technique uses an evaporation mask that is suspended above the substrate (see figure). The evaporation mask can be formed from two or more layers of resist, to allow creation of the extreme undercut needed. Depending on the evaporation angle, the shadow image of the mask is projected onto different positions on the substrate. By carefully choosing the angle for each material to be deposited, adjacent openings in the mask can be projected onto the same spot, creating an overlay of two thin films with a well-defined geometry. Efforts to create multilayered structures are complicated by a need to align each layer with those below it; as all openings are on the same mask, shadow evaporation reduces this need by being self-aligning. Additionally, this allows the substrate to be kept under high vacuum, as there is no need to increase pressure to switch between multiple masks. Due to its downsides, including restrictions on feature density from excess evaporated material, shadow evaporation is generally only suitable for very low scale integration.
gold:hypernym
dbr:Method
prov:wasDerivedFrom
wikipedia-en:Niemeyer–Dolan_technique?oldid=1112397002&ns=0
dbo:wikiPageLength
3034
foaf:isPrimaryTopicOf
wikipedia-en:Niemeyer–Dolan_technique
Subject Item
dbr:Undercut_(etching)
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Superconducting_quantum_computing
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
Subject Item
dbr:Shadow_evaporation_technique
dbo:wikiPageWikiLink
dbr:Niemeyer–Dolan_technique
dbo:wikiPageRedirects
dbr:Niemeyer–Dolan_technique
Subject Item
wikipedia-en:Niemeyer–Dolan_technique
foaf:primaryTopic
dbr:Niemeyer–Dolan_technique