This HTML5 document contains 165 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
dctermshttp://purl.org/dc/terms/
n19http://dbpedia.org/resource/Journal_of_Vacuum_Science_Technology_B:
dbohttp://dbpedia.org/ontology/
n8http://dbpedia.org/resource/Journal_of_Vacuum_Science_&_Technology_A:
foafhttp://xmlns.com/foaf/0.1/
n23https://global.dbpedia.org/id/
n22http://dbpedia.org/resource/Journal_of_Vacuum_Science_and_Technology_A:
schemahttp://schema.org/
dbthttp://dbpedia.org/resource/Template:
rdfshttp://www.w3.org/2000/01/rdf-schema#
n15http://dbpedia.org/resource/Journal_of_Vacuum_Science_and_Technology_B,_Nanotechnology_and_Microelectronics:
freebasehttp://rdf.freebase.com/ns/
n17http://dbpedia.org/resource/Journal_of_Vacuum_Science_and_Technology_B:
n21http://dbpedia.org/resource/Journal_of_Vacuum_Science_&_Technology_B,_Nanotechnology_&_Microelectronics:
n24http://dbpedia.org/resource/Journal_of_Vacuum_Science_&_Technology_B,_Nanotechnology_and_Microelectronics:
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
owlhttp://www.w3.org/2002/07/owl#
n20http://dbpedia.org/resource/Journal_of_Vacuum_Science_&_Technology_B:
wikipedia-enhttp://en.wikipedia.org/wiki/
dbphttp://dbpedia.org/property/
provhttp://www.w3.org/ns/prov#
dbchttp://dbpedia.org/resource/Category:
xsdhhttp://www.w3.org/2001/XMLSchema#
n9http://scitation.aip.org/content/avs/journal/
wikidatahttp://www.wikidata.org/entity/
goldhttp://purl.org/linguistics/gold/
dbrhttp://dbpedia.org/resource/

Statements

Subject Item
dbr:American_Institute_of_Physics
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Index_of_physics_articles_(J)
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:List_of_physics_journals
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Paul_K._Chu
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Leroy_Chang
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J._Vac._Sci._Technol.
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J._Vac._Sci._Technol._A
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J._Vac._Sci._Technol._B
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J_Vac_Sci_Technol
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J_Vac_Sci_Technol_A
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J_Vac_Sci_Technol_B
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:American_Vacuum_Society
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_and_Technology
rdf:type
wikidata:Q234460 dbo:Work dbo:AcademicJournal wikidata:Q1092563 dbo:PeriodicalLiterature dbo:WrittenWork schema:CreativeWork owl:Thing wikidata:Q386724
rdfs:label
Journal of Vacuum Science and Technology
rdfs:comment
The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil (University of Minnesota).
foaf:name
Journal of Vacuum Science and Technology
foaf:homepage
n9:jvst
dcterms:subject
dbc:Bimonthly_journals dbc:Physics_journals dbc:English-language_journals dbc:American_Institute_of_Physics_academic_journals dbc:Publications_established_in_1964
dbo:wikiPageID
10136906
dbo:wikiPageRevisionID
1063000185
dbo:wikiPageWikiLink
dbr:Journal_Citation_Reports dbr:Thin_films dbr:Impact_factor dbr:Peer-reviewed dbc:Bimonthly_journals dbr:American_Vacuum_Society dbr:Scientific_journal dbr:Microlithography dbc:Physics_journals dbr:University_of_Minnesota dbr:Vacuum_metallurgy dbr:Plasma_processing dbr:Editor-in-chief dbr:American_Institute_of_Physics dbc:English-language_journals dbr:Surface_science dbr:Physics dbc:Publications_established_in_1964 dbc:American_Institute_of_Physics_academic_journals
dbo:wikiPageExternalLink
n9:jvstb n9:jvst n9:jvsta
owl:sameAs
wikidata:Q6296031 n23:4p2sd freebase:m.02q2_d5
dbp:wikiPageUsesTemplate
dbt:Reflist dbt:Infobox_journal
dbp:lccn
83643441 83642371
dbp:impact
1.416 2.427
dbp:abbreviation
J. Vac. Sci. Technol.
dbp:country
United States
dbp:discipline
dbr:Physics
dbp:editor
Eray Aydil
dbp:frequency
Bimonthly
dbp:history
1964
dbp:issn
734 22
dbp:language
English
dbp:link
n9:jvsta n9:jvstb
dbp:oclc
8697396 8697479
dbp:publisher
American Institute of Physics on behalf of the American Vacuum Society
dbp:title
Journal of Vacuum Science and Technology
dbp:website
n9:jvst
dbo:abstract
The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil (University of Minnesota).
dbp:coden
JVTAD6 JVTBD9
dbp:eissn
1520
dbp:impactYear
2020
dbp:issnlabel
Journal of Vacuum Science and Technology A Journal of Vacuum Science and Technology B Journal of Vacuum Science and Technology
dbp:link1Name
Part A
dbp:link2Name
Part B
dbo:impactFactor
1.416 2.427
dbo:impactFactorAsOf
2020-01-01
gold:hypernym
dbr:Journal
prov:wasDerivedFrom
wikipedia-en:Journal_of_Vacuum_Science_and_Technology?oldid=1063000185&ns=0
dbo:wikiPageLength
3674
dbo:abbreviation
J. Vac. Sci. Technol.
dbo:firstPublicationYear
1964-01-01
dbo:frequencyOfPublication
Bimonthly
dbo:issn
0022-5355
dbo:academicDiscipline
dbr:Physics
dbo:publisher
dbr:American_Institute_of_Physics
foaf:isPrimaryTopicOf
wikipedia-en:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:J._E._Greene
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Ultra-high_vacuum
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_&_Technology
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n8:_Vacuum,_Surfaces,_&_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n8:_Vacuum,_Surfaces_&_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_&_Technology_A_Vacuum_Surfaces_&_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_&_Technology_A_Vacuum_Surfaces_and_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n21:_Materials,_Processing,_Measurement,_&_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n20:_Microelectronics_&_Nanometer_Structures
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n20:_Microelectronics_&_Nanometer_Structures_Processing,_Measurement,_&_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n20:_Microelectronics_Processing_&_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n19:_Microelectronics_&_Nanometer_Structures
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n19:_Microelectronics_and_Nanometer_Structures
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n22:_Vacuum,_Surfaces_and_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_and_Technology_A_Vacuum_Surfaces_and_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n15:_Materials,_Processing,_Measurement,_and_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n17:_Microelectronics_and_Nanometer_Structures_Processing,_Measurement,_and_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_&_Technology_A
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n8:_Vacuum,_Surfaces,_and_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_&_Technology_B
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n24:_Materials,_Processing,_Measurement,_and_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n20:_Microelectronics_Processing_and_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n20:_Microelectronics_and_Nanometer_Structures
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n20:_Microelectronics_and_Nanometer_Structures_Processing,_Measurement,_and_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_and_Technology_A
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n22:_Vacuum,_Surfaces,_and_Films
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
dbr:Journal_of_Vacuum_Science_and_Technology_B
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n17:_Microelectronics_Processing_and_Phenomena
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
n17:_Microelectronics_and_Nanometer_Structures
dbo:wikiPageWikiLink
dbr:Journal_of_Vacuum_Science_and_Technology
dbo:wikiPageRedirects
dbr:Journal_of_Vacuum_Science_and_Technology
Subject Item
wikipedia-en:Journal_of_Vacuum_Science_and_Technology
foaf:primaryTopic
dbr:Journal_of_Vacuum_Science_and_Technology