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About: Rapid thermal processing     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : yago:Substance100019613, within Data Space : dbpedia.org associated with source document(s)

Type: yago:WikicatSemiconductorsyago:Abstraction100002137yago:Conductor114821043yago:Material114580897yago:Matter100020827yago:Part113809207yago:PhysicalEntity100001930yago:Relation100031921yago:Semiconductor114821248yago:Substance100019613 New Facet based on Instances of this Class

Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than a few seconds. During cooling wafer temperatures must be brought down slowly to prevent dislocations and wafer breakage due to thermal shock. Such rapid heating rates are often attained by high intensity lamps or lasers. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.