@prefix foaf:	<http://xmlns.com/foaf/0.1/> .
@prefix wikipedia-en:	<http://en.wikipedia.org/wiki/> .
@prefix dbr:	<http://dbpedia.org/resource/> .
wikipedia-en:Selective_area_epitaxy	foaf:primaryTopic	dbr:Selective_area_epitaxy .
@prefix owl:	<http://www.w3.org/2002/07/owl#> .
@prefix wikidata:	<http://www.wikidata.org/entity/> .
dbr:Selective_area_epitaxy	owl:sameAs	wikidata:Q7447753 ,
		dbr:Selective_area_epitaxy ,
		<https://global.dbpedia.org/id/4v8cR> ,
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@prefix rdfs:	<http://www.w3.org/2000/01/rdf-schema#> .
dbr:Selective_area_epitaxy	rdfs:label	"Selective area epitaxy"@en .
@prefix dct:	<http://purl.org/dc/terms/> .
@prefix dbc:	<http://dbpedia.org/resource/Category:> .
dbr:Selective_area_epitaxy	dct:subject	dbc:Chemical_vapor_deposition ,
		dbc:Semiconductor_device_fabrication .
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dbr:Selective_area_epitaxy	prov:wasDerivedFrom	<http://en.wikipedia.org/wiki/Selective_area_epitaxy?oldid=1307344687&ns=0> .
@prefix gold:	<http://purl.org/linguistics/gold/> .
dbr:Selective_area_epitaxy	gold:hypernym	dbr:Growth ;
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dbr:Selective_area_epitaxy	dbo:wikiPageWikiLink	dbr:Silicon_dioxide ,
		dbr:Sticking_coefficient ,
		dbr:Silicon_nitride ,
		dbc:Semiconductor_device_fabrication ,
		dbr:Semiconductor ,
		dbr:Metalorganic_vapour-phase_epitaxy ,
		dbr:Microfabrication ,
		dbr:Liquid_phase_epitaxy ,
		dbr:Molecular-beam_epitaxy ,
		dbr:Chemical_beam_epitaxy ,
		dbr:Electron-beam_lithography ,
		dbr:Nanowire ,
		dbr:Epitaxy ,
		dbr:Quantum_dot ,
		dbr:Nanostructure ,
		dbr:Dielectric ,
		dbr:Topological_quantum_computer ;
	dbo:description	"local growth of epitaxial layer through a patterned dielectric mask deposited on a semiconductor substrate"@en .
@prefix dbp:	<http://dbpedia.org/property/> .
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dbr:Selective_area_epitaxy	dbp:wikiPageUsesTemplate	dbt:Reflist ,
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dbr:Epitaxy	dbo:wikiPageWikiLink	dbr:Selective_area_epitaxy .
dbr:SAE	dbo:wikiPageWikiLink	dbr:Selective_area_epitaxy ;
	dbo:wikiPageDisambiguates	dbr:Selective_area_epitaxy .