{
  "http://en.wikipedia.org/wiki/Selective_area_epitaxy" : { "http://xmlns.com/foaf/0.1/primaryTopic" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Selective_area_epitaxy" } ] } ,
  "http://dbpedia.org/resource/Epitaxy" : { "http://dbpedia.org/ontology/wikiPageWikiLink" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Selective_area_epitaxy" } ] } ,
  "http://dbpedia.org/resource/SAE" : { "http://dbpedia.org/ontology/wikiPageWikiLink" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Selective_area_epitaxy" } ] ,
    "http://dbpedia.org/ontology/wikiPageDisambiguates" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Selective_area_epitaxy" } ] } ,
  "http://dbpedia.org/resource/Selective_area_epitaxy" : { "http://www.w3.org/2002/07/owl#sameAs" : [ { "type" : "uri", "value" : "http://www.wikidata.org/entity/Q7447753" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Selective_area_epitaxy" } ,
      { "type" : "uri", "value" : "http://rdf.freebase.com/ns/m.0479l68" } ,
      { "type" : "uri", "value" : "https://global.dbpedia.org/id/4v8cR" } ] ,
    "http://www.w3.org/2000/01/rdf-schema#label" : [ { "type" : "literal", "value" : "Selective area epitaxy" , "lang" : "en" } ] ,
    "http://purl.org/dc/terms/subject" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Category:Chemical_vapor_deposition" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Category:Semiconductor_device_fabrication" } ] ,
    "http://www.w3.org/ns/prov#wasDerivedFrom" : [ { "type" : "uri", "value" : "http://en.wikipedia.org/wiki/Selective_area_epitaxy?oldid=1307344687&ns=0" } ] ,
    "http://purl.org/linguistics/gold/hypernym" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Growth" } ] ,
    "http://xmlns.com/foaf/0.1/isPrimaryTopicOf" : [ { "type" : "uri", "value" : "http://en.wikipedia.org/wiki/Selective_area_epitaxy" } ] ,
    "http://dbpedia.org/ontology/wikiPageWikiLink" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Molecular-beam_epitaxy" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Electron-beam_lithography" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Silicon_nitride" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Category:Semiconductor_device_fabrication" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Metalorganic_vapour-phase_epitaxy" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Dielectric" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Nanowire" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Semiconductor" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Epitaxy" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Silicon_dioxide" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Liquid_phase_epitaxy" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Microfabrication" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Quantum_dot" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Chemical_beam_epitaxy" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Topological_quantum_computer" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Nanostructure" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Sticking_coefficient" } ] ,
    "http://dbpedia.org/ontology/description" : [ { "type" : "literal", "value" : "local growth of epitaxial layer through a patterned dielectric mask deposited on a semiconductor substrate" , "lang" : "en" } ] ,
    "http://dbpedia.org/property/wikiPageUsesTemplate" : [ { "type" : "uri", "value" : "http://dbpedia.org/resource/Template:Reflist" } ,
      { "type" : "uri", "value" : "http://dbpedia.org/resource/Template:More_citations_needed" } ] }
}
